---
_id: '1788'
abstract:
- lang: eng
text: We fabricate and characterize a microscale silicon opto-electromechanical
system whose mechanical motion is coupled capacitively to an electrical circuit
and optically via radiation pressure to a photonic crystal cavity. To achieve
large electromechanical interaction strength, we implement an inverse shadow mask
fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining
a silicon surface quality necessary for minimizing optical loss. Using the sensitive
optical read-out of the photonic crystal cavity, we characterize the linear and
nonlinear capacitive coupling to the fundamental ωm=2π = 63 MHz in-plane flexural
motion of the structure, showing that the large electromechanical coupling in
such devices may be suitable for realizing efficient microwave-to-optical signal
conversion.
acknowledgement: This work was supported by the DARPA MESO program, the AFOSR Hybrid
Nanophotonics MURI, the Institute for Quantum Information and Matter, an NSF Physics
Frontiers Center with support of the Gordon and Betty Moore Foundation, and the
Kavli Nanoscience Institute at Caltech. AP gratefully acknowledge funding from EU
through Marie Curie Actions, project NEMO (GA 298861). AT acknowledges partial financial
support from the ERC through the advanced grant SoulMan
author:
- first_name: Alessandro
full_name: Pitanti, Alessandro
last_name: Pitanti
- first_name: Johannes M
full_name: Johannes Fink
id: 4B591CBA-F248-11E8-B48F-1D18A9856A87
last_name: Fink
orcid: 0000-0001-8112-028X
- first_name: Amir
full_name: Safavi-Naeini, Amir H
last_name: Safavi Naeini
- first_name: Jeff
full_name: Hill, Jeff T
last_name: Hill
- first_name: Chan
full_name: Lei, Chan U
last_name: Lei
- first_name: Alessandro
full_name: Tredicucci, Alessandro
last_name: Tredicucci
- first_name: Oskar
full_name: Painter, Oskar J
last_name: Painter
citation:
ama: Pitanti A, Fink JM, Safavi Naeini A, et al. Strong opto-electro-mechanical
coupling in a silicon photonic crystal cavity. Optics Express. 2015;23(3):3196-3208.
doi:10.1364/OE.23.003196
apa: Pitanti, A., Fink, J. M., Safavi Naeini, A., Hill, J., Lei, C., Tredicucci,
A., & Painter, O. (2015). Strong opto-electro-mechanical coupling in a silicon
photonic crystal cavity. Optics Express. Optical Society of America. https://doi.org/10.1364/OE.23.003196
chicago: Pitanti, Alessandro, Johannes M Fink, Amir Safavi Naeini, Jeff Hill, Chan
Lei, Alessandro Tredicucci, and Oskar Painter. “Strong Opto-Electro-Mechanical
Coupling in a Silicon Photonic Crystal Cavity.” Optics Express. Optical
Society of America, 2015. https://doi.org/10.1364/OE.23.003196.
ieee: A. Pitanti et al., “Strong opto-electro-mechanical coupling in a silicon
photonic crystal cavity,” Optics Express, vol. 23, no. 3. Optical Society
of America, pp. 3196–3208, 2015.
ista: Pitanti A, Fink JM, Safavi Naeini A, Hill J, Lei C, Tredicucci A, Painter
O. 2015. Strong opto-electro-mechanical coupling in a silicon photonic crystal
cavity. Optics Express. 23(3), 3196–3208.
mla: Pitanti, Alessandro, et al. “Strong Opto-Electro-Mechanical Coupling in a Silicon
Photonic Crystal Cavity.” Optics Express, vol. 23, no. 3, Optical Society
of America, 2015, pp. 3196–208, doi:10.1364/OE.23.003196.
short: A. Pitanti, J.M. Fink, A. Safavi Naeini, J. Hill, C. Lei, A. Tredicucci,
O. Painter, Optics Express 23 (2015) 3196–3208.
date_created: 2018-12-11T11:54:01Z
date_published: 2015-02-09T00:00:00Z
date_updated: 2021-01-12T06:53:12Z
day: '09'
doi: 10.1364/OE.23.003196
extern: 1
intvolume: ' 23'
issue: '3'
month: '02'
page: 3196 - 3208
publication: Optics Express
publication_status: published
publisher: Optical Society of America
publist_id: '5325'
quality_controlled: 0
status: public
title: Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity
type: journal_article
volume: 23
year: '2015'
...