---
_id: '1355'
abstract:
- lang: eng
text: Radiation pressure has recently been used to effectively couple the quantum
motion of mechanical elements to the fields of optical or microwave light. Integration
of all three degrees of freedom—mechanical, optical and microwave—would enable
a quantum interconnect between microwave and optical quantum systems. We present
a platform based on silicon nitride nanomembranes for integrating superconducting
microwave circuits with planar acoustic and optical devices such as phononic and
photonic crystals. Using planar capacitors with vacuum gaps of 60 nm and spiral
inductor coils of micron pitch we realize microwave resonant circuits with large
electromechanical coupling to planar acoustic structures of nanoscale dimensions
and femtoFarad motional capacitance. Using this enhanced coupling, we demonstrate
microwave backaction cooling of the 4.48 MHz mechanical resonance of a nanobeam
to an occupancy as low as 0.32. These results indicate the viability of silicon
nitride nanomembranes as an all-in-one substrate for quantum electro-opto-mechanical
experiments.
acknowledgement: This work was supported by the DARPA MESO programme, the Institute
for Quantum Information and Matter, an NSF Physics Frontiers Center with support
of the Gordon and Betty Moore Foundation, and the Kavli Nanoscience Institute at
Caltech. A.P. was supported by a Marie Curie International Outgoing Fellowship within
the 7th European Community Framework Programme, NEMO (GA 298861). Certain commercial
equipment and software are identified in this documentation to describe the subject
adequately. Such identification does not imply recommendation or endorsement by
the NIST, nor does it imply that the equipment identified is necessarily the best
available for the purpose.
article_number: '12396'
author:
- first_name: Johannes M
full_name: Fink, Johannes M
id: 4B591CBA-F248-11E8-B48F-1D18A9856A87
last_name: Fink
orcid: 0000-0001-8112-028X
- first_name: Mahmoud
full_name: Kalaee, Mahmoud
last_name: Kalaee
- first_name: Alessandro
full_name: Pitanti, Alessandro
last_name: Pitanti
- first_name: Richard
full_name: Norte, Richard
last_name: Norte
- first_name: Lukas
full_name: Heinzle, Lukas
last_name: Heinzle
- first_name: Marcelo
full_name: Davanço, Marcelo
last_name: Davanço
- first_name: Kartik
full_name: Srinivasan, Kartik
last_name: Srinivasan
- first_name: Oskar
full_name: Painter, Oskar
last_name: Painter
citation:
ama: Fink JM, Kalaee M, Pitanti A, et al. Quantum electromechanics on silicon nitride
nanomembranes. Nature Communications. 2016;7. doi:10.1038/ncomms12396
apa: Fink, J. M., Kalaee, M., Pitanti, A., Norte, R., Heinzle, L., Davanço, M.,
… Painter, O. (2016). Quantum electromechanics on silicon nitride nanomembranes.
Nature Communications. Nature Publishing Group. https://doi.org/10.1038/ncomms12396
chicago: Fink, Johannes M, Mahmoud Kalaee, Alessandro Pitanti, Richard Norte, Lukas
Heinzle, Marcelo Davanço, Kartik Srinivasan, and Oskar Painter. “Quantum Electromechanics
on Silicon Nitride Nanomembranes.” Nature Communications. Nature Publishing
Group, 2016. https://doi.org/10.1038/ncomms12396.
ieee: J. M. Fink et al., “Quantum electromechanics on silicon nitride nanomembranes,”
Nature Communications, vol. 7. Nature Publishing Group, 2016.
ista: Fink JM, Kalaee M, Pitanti A, Norte R, Heinzle L, Davanço M, Srinivasan K,
Painter O. 2016. Quantum electromechanics on silicon nitride nanomembranes. Nature
Communications. 7, 12396.
mla: Fink, Johannes M., et al. “Quantum Electromechanics on Silicon Nitride Nanomembranes.”
Nature Communications, vol. 7, 12396, Nature Publishing Group, 2016, doi:10.1038/ncomms12396.
short: J.M. Fink, M. Kalaee, A. Pitanti, R. Norte, L. Heinzle, M. Davanço, K. Srinivasan,
O. Painter, Nature Communications 7 (2016).
date_created: 2018-12-11T11:51:33Z
date_published: 2016-08-03T00:00:00Z
date_updated: 2021-01-12T06:50:06Z
day: '03'
ddc:
- '530'
department:
- _id: JoFi
doi: 10.1038/ncomms12396
file:
- access_level: open_access
checksum: 25513bd59d5bda495efa8f5920e91b22
content_type: application/pdf
creator: system
date_created: 2018-12-12T10:13:30Z
date_updated: 2020-07-14T12:44:46Z
file_id: '5014'
file_name: IST-2016-629-v1+1_ncomms12396.pdf
file_size: 2139802
relation: main_file
file_date_updated: 2020-07-14T12:44:46Z
has_accepted_license: '1'
intvolume: ' 7'
language:
- iso: eng
license: https://creativecommons.org/licenses/by/4.0/
month: '08'
oa: 1
oa_version: Published Version
publication: Nature Communications
publication_status: published
publisher: Nature Publishing Group
publist_id: '5891'
pubrep_id: '629'
quality_controlled: '1'
scopus_import: 1
status: public
title: Quantum electromechanics on silicon nitride nanomembranes
tmp:
image: /images/cc_by.png
legal_code_url: https://creativecommons.org/licenses/by/4.0/legalcode
name: Creative Commons Attribution 4.0 International Public License (CC-BY 4.0)
short: CC BY (4.0)
type: journal_article
user_id: 3E5EF7F0-F248-11E8-B48F-1D18A9856A87
volume: 7
year: '2016'
...