--- _id: '1355' abstract: - lang: eng text: Radiation pressure has recently been used to effectively couple the quantum motion of mechanical elements to the fields of optical or microwave light. Integration of all three degrees of freedom—mechanical, optical and microwave—would enable a quantum interconnect between microwave and optical quantum systems. We present a platform based on silicon nitride nanomembranes for integrating superconducting microwave circuits with planar acoustic and optical devices such as phononic and photonic crystals. Using planar capacitors with vacuum gaps of 60 nm and spiral inductor coils of micron pitch we realize microwave resonant circuits with large electromechanical coupling to planar acoustic structures of nanoscale dimensions and femtoFarad motional capacitance. Using this enhanced coupling, we demonstrate microwave backaction cooling of the 4.48 MHz mechanical resonance of a nanobeam to an occupancy as low as 0.32. These results indicate the viability of silicon nitride nanomembranes as an all-in-one substrate for quantum electro-opto-mechanical experiments. acknowledgement: This work was supported by the DARPA MESO programme, the Institute for Quantum Information and Matter, an NSF Physics Frontiers Center with support of the Gordon and Betty Moore Foundation, and the Kavli Nanoscience Institute at Caltech. A.P. was supported by a Marie Curie International Outgoing Fellowship within the 7th European Community Framework Programme, NEMO (GA 298861). Certain commercial equipment and software are identified in this documentation to describe the subject adequately. Such identification does not imply recommendation or endorsement by the NIST, nor does it imply that the equipment identified is necessarily the best available for the purpose. article_number: '12396' author: - first_name: Johannes M full_name: Fink, Johannes M id: 4B591CBA-F248-11E8-B48F-1D18A9856A87 last_name: Fink orcid: 0000-0001-8112-028X - first_name: Mahmoud full_name: Kalaee, Mahmoud last_name: Kalaee - first_name: Alessandro full_name: Pitanti, Alessandro last_name: Pitanti - first_name: Richard full_name: Norte, Richard last_name: Norte - first_name: Lukas full_name: Heinzle, Lukas last_name: Heinzle - first_name: Marcelo full_name: Davanço, Marcelo last_name: Davanço - first_name: Kartik full_name: Srinivasan, Kartik last_name: Srinivasan - first_name: Oskar full_name: Painter, Oskar last_name: Painter citation: ama: Fink JM, Kalaee M, Pitanti A, et al. Quantum electromechanics on silicon nitride nanomembranes. Nature Communications. 2016;7. doi:10.1038/ncomms12396 apa: Fink, J. M., Kalaee, M., Pitanti, A., Norte, R., Heinzle, L., Davanço, M., … Painter, O. (2016). Quantum electromechanics on silicon nitride nanomembranes. Nature Communications. Nature Publishing Group. https://doi.org/10.1038/ncomms12396 chicago: Fink, Johannes M, Mahmoud Kalaee, Alessandro Pitanti, Richard Norte, Lukas Heinzle, Marcelo Davanço, Kartik Srinivasan, and Oskar Painter. “Quantum Electromechanics on Silicon Nitride Nanomembranes.” Nature Communications. Nature Publishing Group, 2016. https://doi.org/10.1038/ncomms12396. ieee: J. M. Fink et al., “Quantum electromechanics on silicon nitride nanomembranes,” Nature Communications, vol. 7. Nature Publishing Group, 2016. ista: Fink JM, Kalaee M, Pitanti A, Norte R, Heinzle L, Davanço M, Srinivasan K, Painter O. 2016. Quantum electromechanics on silicon nitride nanomembranes. Nature Communications. 7, 12396. mla: Fink, Johannes M., et al. “Quantum Electromechanics on Silicon Nitride Nanomembranes.” Nature Communications, vol. 7, 12396, Nature Publishing Group, 2016, doi:10.1038/ncomms12396. short: J.M. Fink, M. Kalaee, A. Pitanti, R. Norte, L. Heinzle, M. Davanço, K. Srinivasan, O. Painter, Nature Communications 7 (2016). date_created: 2018-12-11T11:51:33Z date_published: 2016-08-03T00:00:00Z date_updated: 2021-01-12T06:50:06Z day: '03' ddc: - '530' department: - _id: JoFi doi: 10.1038/ncomms12396 file: - access_level: open_access checksum: 25513bd59d5bda495efa8f5920e91b22 content_type: application/pdf creator: system date_created: 2018-12-12T10:13:30Z date_updated: 2020-07-14T12:44:46Z file_id: '5014' file_name: IST-2016-629-v1+1_ncomms12396.pdf file_size: 2139802 relation: main_file file_date_updated: 2020-07-14T12:44:46Z has_accepted_license: '1' intvolume: ' 7' language: - iso: eng license: https://creativecommons.org/licenses/by/4.0/ month: '08' oa: 1 oa_version: Published Version publication: Nature Communications publication_status: published publisher: Nature Publishing Group publist_id: '5891' pubrep_id: '629' quality_controlled: '1' scopus_import: 1 status: public title: Quantum electromechanics on silicon nitride nanomembranes tmp: image: /images/cc_by.png legal_code_url: https://creativecommons.org/licenses/by/4.0/legalcode name: Creative Commons Attribution 4.0 International Public License (CC-BY 4.0) short: CC BY (4.0) type: journal_article user_id: 3E5EF7F0-F248-11E8-B48F-1D18A9856A87 volume: 7 year: '2016' ...