Tunable mechanical coupling between driven microelectromechanical resonators

G. Verbiest, D. Xu, M. Goldsche, T. Khodkov, S. Barzanjeh, N. Von Den Driesch, D. Buca, C. Stampfer, Applied  Physics Letter 109 (2016).


Journal Article | Published | English
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Abstract
We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive actuator, which is used to tune the tension in the silicon beam and thus its resonance frequency. By measuring the resonance frequencies of the system, we show that the comb-drive actuator and the silicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate (1.5 MHz) is tunable with the comb-drive actuator (10%) as well as with a side-gate (10%) placed close to the silicon beam. In contrast, the effective spring constant of the system is insensitive to either of them and changes only by 60.5%. Finally, we show that the comb-drive actuator can be used to switch between different coupling rates with a frequency of at least 10 kHz.
Publishing Year
Date Published
2016-10-04
Journal Title
Applied Physics Letter
Acknowledgement
We acknowledge the support from the Helmholtz Nanoelectronic Facility (HNF) and funding from the ERC (GA-Nr. 280140).
Volume
109
Article Number
143507
IST-REx-ID

Cite this

Verbiest G, Xu D, Goldsche M, et al. Tunable mechanical coupling between driven microelectromechanical resonators. Applied  Physics Letter. 2016;109. doi:10.1063/1.4964122
Verbiest, G., Xu, D., Goldsche, M., Khodkov, T., Barzanjeh, S., Von Den Driesch, N., … Stampfer, C. (2016). Tunable mechanical coupling between driven microelectromechanical resonators. Applied  Physics Letter, 109. https://doi.org/10.1063/1.4964122
Verbiest, Gerard, Duo Xu, Matthias Goldsche, Timofiy Khodkov, Shabir Barzanjeh, Nils Von Den Driesch, Dan Buca, and Christoph Stampfer. “Tunable Mechanical Coupling between Driven Microelectromechanical Resonators.” Applied  Physics Letter 109 (2016). https://doi.org/10.1063/1.4964122.
G. Verbiest et al., “Tunable mechanical coupling between driven microelectromechanical resonators,” Applied  Physics Letter, vol. 109, 2016.
Verbiest G, Xu D, Goldsche M, Khodkov T, Barzanjeh S, Von Den Driesch N, Buca D, Stampfer C. 2016. Tunable mechanical coupling between driven microelectromechanical resonators. Applied  Physics Letter. 109.
Verbiest, Gerard, et al. “Tunable Mechanical Coupling between Driven Microelectromechanical Resonators.” Applied  Physics Letter, vol. 109, 143507, American Institute of Physics, 2016, doi:10.1063/1.4964122.

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